Course
| code | EC530 |
| credit_hours | 3 |
| title | Micro-Electromechanical Systems (MEMS) |
| arbic title | |
| prequisites | EC434 |
| credit hours | 3 |
| Description/Outcomes | MEMS technology, revolution and advantages of MEMS technology. Description of the MEMS applications, and its fabrication techniques. Also Studying the nature of the piezoelectricity and piezoresistivity. Description of the microsensors, microactuators, different system issues and the scaling effect. Finally describing the Microassembly and an overview on Microrobotics. |
| arabic Description/Outcomes | |
| objectives | Description of MEMS, advantages, technology, and applications MEMs fabrication techniques.rnNature of the piezoelectricity and piezoresistivity.rnIdentification of the micro-sensors, micro-actuators.rnThe scaling effects.rnKnowledge and understanding of the micro-assembly.rnGaining an experience of the micro-robotics.rnDescribe the microsensors and microactuators. rnDescribe different system issues and the scaling effect.rnDescribe the Microassembly and an overview on Microrobotics. |
| arabic objectives | |
| ref. books | |
| arabic ref. books | |
| textbook | Introduction to Microelectromechanical (MEM) Microwave Systems, H. De Los Santos, Artech House, 1999. |
| arabic textbook | |
| objective set | |
| content set | |
Course Content
| content serial |
Description |
| 1 |
MEMS technology, revolution and advantages
|
| 2 |
MEMS applications
|
| 3 |
MEMs fabrication techniques
|
| 4 |
Nature of the piezoelectricity and piezoresistivity and their applications in the microsensors
|
| 5 |
The MEMS inductor and capacitors
|
| 6 |
Identification of the micro-sensors
|
| 7 |
micro-actuators
|
| 8 |
The scaling effects
|
| 9 |
The micro-assembly
|
| 10 |
Micro-robotics
|
| 11 |
Micro-robotics
|
| 12 |
Micro-robotics
|
| 13 |
Reconfigurable elements (architecture)
|
| 14 |
Reconfigurable elements (programming)
|
| 15 |
Reconfigurable elements(testing and verification)
|
| 16 |
Final Exam
|